Advances in electrochemical energy storage technologies drive the need for battery safety performance and miniaturization,which calls for the easily processable polymer electrolytes suitable for on-chip microbattery technology.However,the low ionic conductivity of polymer electrolytes and poor-patternable capabilities hinder their application in microdevices.Herein,we modified SU-8,as the matrix material,by poly(ethylene oxide)(PEO)with lithium salts to obtain a patternable lithium-ion polymer electrolyte.Due to the highly amorphous state and more Li-ion transport pathways through blending effect and the increase in number of epoxides,the ionic conductivity of achieved sample is increased by an order of magnitude to 2.9×10^(−4) S·cm^(−1) in comparison with the SU-8 sample at 50°C.The modified SU-8 exhibits good thermal stability(>150°C),mechanical properties(elastic modulus of 1.52 GPa),as well as an electrochemical window of 4.3 V.Half-cell and microdevice were fabricated and tested to verify the possibility of the micro-sized on-chip battery.All of these results demonstrate a promising strategy for the integration of on-chip batteries with microelectronics.
Tianzhao LiXuelei PanZhongzhuo YangFang LiuKesong YuLin XuLiqiang Mai
