Nanopowder of xwt% SiO2+WO3(x=0,3,10,15,20) was prepared by means of solid state reaction and deposition method.The microstructure was characterized by XRD and TEM.It was observed that the nanosized monoclinic and triclinic crystal phase of WO3 formed together and the grain size decreased with the increasing adulterate quantity of SiO2.The average grain size of the solid power is about 5060nm,the deposition power is about 2030nm,and the granularity is uniform.With the increasing amount of SiO2,the proportion of the monoclinic phase decreased,and the proportion of the triclinic phase increased.