Polyaniline-7,7,8,8-tetracyanoquinodimethanane (PANI-TCNQ) complex thin films were successfully grown by vacuum evaporation.The atomic force microscope (AFM) images showed that the rough PANI film is loosely constructed from many large spherical clusters.While the PANI-TCNQ film,closely packed with many small powder-like clusters,is densified and flat.The microstructure of the complex film can be made better by vacuum annealing.Charge transfer,from PANI chains to TCNQ molecule,was observed from Fourier transfer infrared spectrum of the complex film.The charge transfer can be intensified by vacuum annealing.The relationship between the microstructure and the electric properties of the film was discussed.