A Mach-Zehnder(MZ) electro-optic(EO) modulator are real iz ed,with three optical layers as polymer materials.The functional layer is the co rona poled crosslinkable polyurethane.The ridge waveguide is fabricated by using the spin-coating,poling,photolithography and oxygen reactive ion etching(RIE) techniques.The mode and the modulation properties of these devices are demonstra ted in a micron control system,while the light source works at the wavelength of 1 31 or 1 55 micron.
A polymer electro optic modulator has been fabricated with the functional layer acting as a kind of corona poled crosslinkable polyurethane. The three optical layers, namely waveguide, photolithography and oxygen are fabricated by spin coating. With the Reactive Ion Etching method, the ridge of the waveguide is constructed. With light at 1 31μm being fiber coupled to waveguide, the mode and the modulation properties of these devices are demonstrated in a micron control system.
