The surface defect distribution in stainless steel irradiated with intensepulsed ion beam (IPIB) of current density above 60A/cm^2 and acceleration voltage 300-500ke V wasdiscussed and analyzed. The defects near the surface of stainless steel were generated in two ways:(1) generated by the bombardment of energetic ions and (2) induced by the high level stress near thesurface. Thus the temperature and stress distributions near the steel surface were calculated bymeans of our STEIPIB code, which treated with the thermal-dynamical process in the target irradiatedby the IPIB. Based on these distributions, the generations and movements of these defects werediscussed and compared with the experiment results.
