Nb/Al-AlOx/Nb tunnel junctions are often used in the studies of macroscopic quantum phenomena and superconducting qubit applications of the Josephson devices. In this work, we describe a convenient and reliable process using electron beam lithography for the fabrication of high-quality, submicron-sized Nb/Al-AlOx/Nb Josephson junctions. The technique follows the well-known selective Nb etching process and produces high-quality junctions with Vm=100 mV at 2.3 K for the typical critical current density of 2.2 kA/cm^2, which can be adjusted by controlling the oxygen pressure and oxidation time during the formation of the tunnelling barrier. We present the results of the temperature dependence of the sub-gap current and in-plane magnetic-field dependence of the critical current, and compare them with the theoretical predictions.
Nb/Al-AlOx/Nb tunnel junctions with controllable critical current density Jc are fabricated using the standard selective Nb etching process. Tunnel barriers are formed in different oxygen exposure conditions （oxygen pressure P and oxidation time t）, giving rise to Jc ranging from 100A/cm^2 to above 2000A/cm^2. Jc shows a familiar linear dependence on P×t in logarithmic scales. We calculate the energy levels of the phase- and flux-type qubits using the achievable junction parameters and show that the fabricated Nb/Al-AlOx/Nb tunnel junctions can be used conveniently for quantum computation applications in the future.
This paper reports the fabrication and test of a high-Tc SQUID planar gradiometer which is patterned from YBCO thin film deposited on a SrTiO3 bicrystal substrate. The measurement of noise spectrum at 77K shows that the white noise at 200 Hz is about 1×10^-4 φ0/√Hz. The minimal magnetic gradient is measured and the results suggest that the minimal magnetic gradient is 94 pT/m. The planar gradiometer is used in non-destructive evaluation （NDE） experiments to detect the artifacts in conducting aluminium plates by performing eddy current testing in an unshielded environment. The effect of the exciting coil dimension on the NDE results is investigated. By mapping out the induced field distribution, flaws about 10mm below the plate surface can be clearly identified.
