A 16 channel arrayed waveguide grating demultiplexer with 200 GHz channel spacing based on Si nanowire waveguides is designed. The transmission spectra response simulated by transmission function method shows that the device has channel spacing of 1.6 nm and crosstalk of 31 dB. The device is fabricated by 193 nm deep UV lithography in silicon-on-substrate. The demultiplexing characteristics are observed with crosstalk of 5-8 dB, central channel＇s insertion loss of 2.2 dB, flee spectral range of 24.7 nm and average channel spacing of 1.475 nm. The cause of the spectral distortion is analyzed specifically.
H_5 photonic crystal（PC） microcavities co-implanted with erbium（Er） and oxygen（O） ions were fabricated on silicon-on-insulator（SOI） wafers.Photoluminescence（PL） measurements were taken at room temperature and a light extraction enhancement of up to 12 was obtained at 1.54μm,as compared to an identically implanted unpatterned SOI wafer.In addition,we also explored the adjustment of cavity modes by changing the structural parameters of the PC,and the measured results showed that the cavity-resonant peaks shifted towards shorter wavelengths as the radius of the air holes increased,which is consistent with the theoretical simulation.
We demonstrate a novel SOI-based photonic crystal（PC） double-heterostructure slot waveguide microcavity constructed by cascading three PC slot waveguides with different slot widths,and simulate the luminescence enhancement of sol-gel Er-doped SiO2 filled in the microcavity by finite-difference time-domain（FDTD） method.The calculated results indicate that a unique sharp resonant peak dominates in the spectrum at the expected telecommunication wavelength of 1.5509 mm,with very high normalized peak intensity of ~108.The electromagnetic field of the resonant mode exhibits the strongest in the microcavity,and decays rapidly to zero along both sides,which means that the resonant mode field is well confined in the microcavity.The simulation results fully verify the enhancement of luminescence by PC double-heterostructure slot waveguide microcavity theoretically,which is a promising way to realize the high-efficiency luminescence of Si-based materials.
An ultra compact triplexing filter was designed based on a silicon on insulator（SOI） nanowire arrayed waveguide grating（AWG） for fiber-to-the-home FTTH.The simulation results revealed that the design performed well in the sense of having a good triplexing function.The designed SOI nanowire AWGs were fabricated using ultraviolet lithography and induced coupler plasma etching.The experimental results showed that the crosstalk was less than -15 dB,and the 3 dB-bandwidth was 11.04 nm.The peak wavelength output from ports a,c,and b were 1455,1510 and 1300 nm,respectively,which deviated from our original expectations.The deviation of the wavelength is mainly caused by 45 nm width deviation of the arrayed waveguides during the course of the fabrication process and partly caused by material dispersion.
Triplexers are designed based on SOl flattop arrayed waveguide gratings （AWGs）. Three wavelengths （1310, 1490,and 1550nm） operate at three diffraction orders of AWGs. Simulation shows that the 3dB bandwidth,crosstalk, and loss are 6nm,less than -40dB, and 5dB, respectively. The output optical fields of the device fabricated in our laboratory are clear and show a good triplexing function.
A 10-channel, 200 GHz channel spacing InP arrayed waveguide grating was designed, and the deep ridge waveguide design makes it polarization independent. Under the technologies of molecular beam epitaxy, lithography, and induced coupler plasma etching, the chip was fabricated in our laboratory. The test results show that the insertion loss is about -8 dB, and the crosstalk is less than -17 dB.
