To resolve inflation of inertial confinement fusion (ICF) target and encapsulation of micro inflation hole with adhesive, a scanning probe microscope (SPM) diamond microprobe was used as the cutting tool with SPM in contact mode. Some parameters influencing the quality of micro inflation hole, such as the scanning direction of the diamond tip, the scanning rate and the contact force are discussed. Accurate taper hole was achieved whose climension and precision could meet the requirements of inflation and encapsulation technique of micro hole. The experimental results show that using SPM diamond microprobe as the cutting tool and with special processing technique, the precision machining of target capsule's taper inflation hole can be realized. A novel operative technology for filling high Z gas to target is provided.
SUN Tao, YAN Yongda, GAO Dangzhong, TANG Yongjian, FU Yibei & DONG ShenPrecision Engineering Research Institute, Harbin Institute of Technology, Harbin 150001, China
