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国家高技术研究发展计划(2003AA1Z1370)

作品数:6 被引量:4H指数:1
相关作者:田立林张大伟余志平章浩竺红卫更多>>
相关机构:清华大学浙江大学北京大学更多>>
发文基金:国家高技术研究发展计划国家自然科学基金更多>>
相关领域:电子电信更多>>

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具有HfN/HfO_2栅结构的p型MOSFET中的负偏置-温度不稳定性研究被引量:1
2006年
研究了HfN/HfO_2高K栅结构p型金属-氧化物-半导体(MOS)晶体管(MOSFET)中,负偏置-温度应力引起的阈值电压不稳定性(NBTI)特征.HfN/HfO_2高K栅结构的等效氧化层厚度(EOT)为1·3nm,内含原生缺陷密度较低.研究表明,由于所制备的HfN/HfO_2高K栅结构具有低的原生缺陷密度,因此在p-MOSFET器件中观察到的NBTI属HfN/HfO_2高K栅结构的本征特征,而非工艺缺陷引起的;进一步研究表明,该HfN/HfO2高K栅结构中观察到的NBTI与传统的SiO2基栅介质p-MOSFET器件中观察到的NBTI具有类似的特征,可以被所谓的反应-扩散(R-D)模型表征:HfN/HfO_2栅结构p-MOSFET器件的NBTI效应的起源可以归为衬底注入空穴诱导的界面反应机理,即在负偏置和温度应力作用下,从Si衬底注入的空穴诱导了Si衬底界面Si-H键断裂这一化学反应的发生,并由此产生了Si+陷阱在Si衬底界面的积累和H原子在介质层内部的扩散,这种Si+陷阱的界面积累和H原子的扩散导致了器件NBTI效应的发生.
萨宁康晋锋杨红刘晓彦张兴韩汝琦
关键词:高K栅介质
Gate-Capacitance-Shift Approach and Compact Modeling for Quantum Mechanical Effects in Poly-Gates
2004年
A new approach,gate-capacitance-shift (GCS) approach,is described for compact modeling.This approach is piecewise for various physical effects and comprises the gate-bias-dependent nature of corrections in the nanoscale regime.Additionally,an approximate-analytical solution to the quantum mechanical (QM) effects in polysilicon (poly)-gates is obtained based on the density gradient model.It is then combined with the GCS approach to develop a compact model for these effects.The model results tally well with numerical simulation.Both the model results and simulation results indicate that the QM effects in poly-gates of nanoscale MOSFETs are non-negligible and have an opposite influence on the device characteristics as the poly-depletion (PD) effects do.
张大伟章浩田立林余志平
Compact Threshold Voltage Model for FinFETs
2005年
A 2D analytical electrostatics analysis for the cross-section of a FinFET (or tri-gate MOSFET) is performed to calculate the threshold voltage.The analysis results in a modified gate capacitance with a coefficient H introduced to model the effect of tri-gates and its asymptotic behavior in 2D is that for double-gate MOSFET.The potential profile obtained analytically at the cross-section agrees well with numerical simulations.A compact threshold voltage model for FinFET,comprising quantum mechanical effects,is then proposed.It is concluded that both gate capacitance and threshold voltage will increase with a decreased height,or a decreased gate-oxide thickness of the top gate,which is a trend in FinFET design.
张大伟田立林余志平
关键词:FINFET
设计规则驱动的多层布线算法被引量:2
2005年
迷宫算法是集成电路两端线网优化布线问题的经典算法。多层布线受复杂版图设计规则约束,简单直接应用迷宫布线算法,或者无法获得优化的结果,或者无法满足设计规则。文章分析了迷宫算法特性与局限,提出基于群组图的多层迷宫算法,圆满地解决了上述问题。
竺红卫
关键词:多层布线
Analytical Modeling of Threshold Voltage for Double-Gate MOSFET Fully Comprising Quantum Mechanical Effects
2005年
The analytical solutions to 1D Schrdinger equation (in depth direction) in double gate (DG) MOSFETs are derived to calculate electron density and threshold voltage.The non uniform potential in the channel is concerned with an arbitrary depth so that the analytical solutions agree well with numerical ones.Then,an implicit expression for electron density and a closed form of threshold voltage are presented fully comprising quantum mechanical (QM) effects.This model predicts an increased electron density with an increasing channel depth in subthreshold region or mild inversion region.However,it becomes independent on channel depth in strong inversion region,which is in accordance with numerical analysis.It is also concluded that the QM model,which barely considers a box like potential in the channel,slightly over predicts threshold voltage and underestimates electron density,and the error increases with an increasing channel depth or a decreasing gate oxide thickness.
张大伟田立林余志平
亚100nm体硅MOSFET集约I-V模型被引量:1
2005年
利用“局域化”的概念和二维泊松方程的解析解,建立了沟道方向上二维量子效应对阈电压的修正模型.基于密度梯度理论,建立了多晶硅栅内量子效应对阈电压的修正模型.在此基础上,结合弹道理论,开发了一个适用于亚100nm MOSFET的集约I V模型.通过与 TSMC提供的沟长为 45nm实际器件测试结果[1],以及与三组亚100nm MOSFET的数值模拟结果的比较,证明了该模型具有良好的精度(平均误差小于8%)和可延伸性.
张大伟章浩朱广平张雪莲田立林余志平
关键词:量子力学效应
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