This paper aimed at extracting optimal structural parameters for Love wave device with structure of multi-waveguides to improve its temperature stability. The theoretical model dealing with the Love wave propagation in multi-waveguides was established first, the dispersion characteristic is depicted by the acoustic propagation theory of stratified media and boundary conditions. Combing with the dispersion characteristics and Tomar＇s method, the optimal structural parameters for the Love wave device with zero temperature coefficient were extracted, and confirmed by the following experimental results. Excellent temperature coefficient of the Love wave device with SU-8/SiO2 on ST-90°X quartz substrate was evaluated experimentally as only 2.16 ppm/℃, which agrees well with the calculated results. The optimized Love wave device is very promising in gas sensing application.
WANG WenHOU JiaoliSHAO XiutingLIU MinghuaHE Shitang
Simple and efficient surface acoustic wave （SAW） two-port resonators with low insertion loss and high Q-values on ST-X quartz substrate using a corrosion-proof A1/Au-stripe electrode structure are developed for gas sensing. It was composed of two shorted grating reflectors and adjacent intedigital transducers （IDT）, and an active metal film in the cavity between the IDTs for the sensitive film coating. The devices are expected to provide good protection towards metal electrode for gas sensors application in chemically reactive environments. Excellent device performance as low insertion loss, high Q factor and single-mode are achieved by carefully selecting the metallic electrode thickness, cavity length and acoustic aperture. Prior to fabrication, the coupling of modes （COM） model was performed for device simulation to determine the optimal design parameters. The fabricated single-mode SAW resonator at operation frequency of 300 MHz range exhibits matched insertion loss of ~6.5 dB and loaded Q factor in the 3000 range. Using the fabricated resonator as the feedback element, a duaresonator-oscillator with excellent frequency stability （0.1 ppm） was developed and evaluated experimentally, and it is significant for performance improvement of SAW gas sensor.
